Auto Bare Wafer Stocker- SPT AI Series

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Auto Bare Wafer Stocker - SPT AI Series

The SPT-AI Series developed by SuperPlus Technology is a storage equipment capable of storing more than 2,000 wafers (Wafer), which integrates the functions of a wafer sorting machine (Sorter) and a pure wafer storage equipment (Stocker) .

Clean gas (XCDA or N2) Ventilation Exchange Device
Air curtain isolation
Wafer warpage detection
Wafer Status Detection
Long-term monitoring of temperature and humidity

In addition, BWS is a hybrid device with output wafer sorting and storage function, integrating wafer sorter and pure wafer storage equipment.
In the limited niche environment of the wafer sorter, the storage area is separated by opening and closing doors of loadport.
By integrating the dual-arm cleaning robot arm, high reliability and low particle dust generation can be achieved.
Using a servo robot arm and linear tracking, a high-speed transfer mode is possible.
Use clamp-type holders to avoid contamination of the backside of the wafer.
It can be designed and equipped according to customer needs, such as: 800, 1600, 2400 or more than 3200 pieces of storage capacity.
An N2 Purge Function model is also available.