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Home > Main Product > Mini Stocker – NTB(Near Tool Buffer)
Advent of AMHS Efficiency Boundary:
In order to cope with the increase in the number of process lanes due to the shrinkage of the process, despite the implementation of high-speed OHT and the installation of OHB/OHC and other facilities in the FAB, the production line with diversified products and small batches still faces the bottleneck of FOUP handling capacity.