Mini Stocker- NTB (Near Tool Buffer)

Advent of AMHS Efficiency Boundary:

In order to cope with the increase in the number of process lanes due to the shrinkage of the process, despite the implementation of high-speed OHT and the installation of OHB/OHC and other facilities in the FAB, the production line with diversified products and small batches still faces the bottleneck of FOUP handling capacity.

  1. Save time for OHT remote fetching
  2. Lower labor cost
  3. Free FOUP purchase fee and storage space
  4. Reduce downtime
  5. Increase capacity

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